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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/15788

Title: Fabrication of Microbowtie Structures for Optical Probing of Nanoscale Objects
Authors: Tseng, A. A.;Diaz, R. E.;Chen, C. D.;Wu, Cen-Shawn
Contributors: 物理學系
Date: 2003-05
Issue Date: 2013-03-12T04:06:06Z
Publisher: SpringerLink
Abstract: A microbowtie array critical to a newly proposed
optical probe is studied. The optical probe is used for
high-speed detection of nanoscale objects. Based on the
concept of Wave Interrogated Near Field Array (WINFA),
an array of microbowtie structures acts as a detector in
amplifying the incident light source to overcome the difficulties
of the conventional optical probe that are limited
by the diffraction limits of the optical light. In the present
study, the micro bowties are fabricated by an electron
beam lithography technique. The paper begins with an
introduction of the probe concept and then the design
considerations are given followed by the fabrication procedure
and results. Two different substrates are considered
to study the charge accumulation problem caused by an
insulating substrate, required by the probe. Results indicate
that the bowtie structure with an indium-tin-oxide
coated glass substrate can minimize the charge accumulation
problem, making it a suitable substrate for the
bowtie structures considered. The paper concludes with
recommendations for making even smaller nano-sized
bowtie structures.
Relation: Microsystem Technologies, 9(5): 335-339
Appears in Collections:[物理學系] 期刊論文

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