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题名: Fabrication of Microbowtie Structures for Optical Probing of Nanoscale Objects
作者: Tseng, A. A.;Diaz, R. E.;Chen, C. D.;Wu, Cen-Shawn
贡献者: 物理學系
日期: 2003-05
上传时间: 2013-03-12T04:06:06Z
出版者: SpringerLink
摘要: A microbowtie array critical to a newly proposed
optical probe is studied. The optical probe is used for
high-speed detection of nanoscale objects. Based on the
concept of Wave Interrogated Near Field Array (WINFA),
an array of microbowtie structures acts as a detector in
amplifying the incident light source to overcome the difficulties
of the conventional optical probe that are limited
by the diffraction limits of the optical light. In the present
study, the micro bowties are fabricated by an electron
beam lithography technique. The paper begins with an
introduction of the probe concept and then the design
considerations are given followed by the fabrication procedure
and results. Two different substrates are considered
to study the charge accumulation problem caused by an
insulating substrate, required by the probe. Results indicate
that the bowtie structure with an indium-tin-oxide
coated glass substrate can minimize the charge accumulation
problem, making it a suitable substrate for the
bowtie structures considered. The paper concludes with
recommendations for making even smaller nano-sized
bowtie structures.
關聯: Microsystem Technologies, 9(5): 335-339
显示于类别:[物理學系] 期刊論文


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