National Changhua University of Education Institutional Repository : Item 987654321/1719

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NCUEIR > College of Engineering > Department and Graduate Institute of Electronic Engineering > Proceedings > Item 987654321/1719

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/1719

Title:	Optical Design and Signal Processing for a Microcrack Detection System
Authors:	Wen-Ren Yang Yu-Lin Li
Contributors:	電機工程學系
Keywords:	Microcrack PNN STDWT
Date:	2010
Issue Date:	2010-11-12T06:56:07Z
Abstract:	This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation. Derived Short-Time Discrete Wavelet Transform (STDWT) is developed in order to identify microcrack.
Relation:	2010 5th IEEE Conference on Industrial Electronics and Applicationsis, June 15-17, 2010:1780-1785
Appears in Collections:	[Department and Graduate Institute of Electronic Engineering] Proceedings

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